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Filmes finos de carbono amorfo hidrogenado depositados por plasma DC pulsado melhorado por confinamento eletrostático : teoria e prática
(2014-06-24)
In this work, amorphous hydrogenated carbon (a-C:H) thin films were deposited
using a simple, low cost and efficient pulsed DC - plasma-enhanced chemical vapor
deposition technique improved by electrostatic confinement ...